innodys

Your partner for Dry Processes !
Sales and Service for the following companies:
Innovative high quality plasma etch
and deposition systems - (ICP, RIE, PECVD)
Pressure, Flow
Level & Temperature Products for
Ultra Clean Processing
  • Chiller Units for Semiconductor Equipment
  • Used with Etch, CVD, CMP, Ion Implant and RTP Equipment
  • In-Line Scrubber system to remove harmfull constituents
    from the effluent gases of LPCVD,PECVD and MOCVD systems.
  • OLEDs Manufacturing System
    (vacuum evaporation & encapsulation)
  • SUNICEL plus100 (for R&D) /
    SUNICEL plus200 (for Pilot )
  • SUNICEL plus400
    (for Mass Production: Tack time 4 min/sheet)

Information-Link: PDF-File		 Leading the Way in
Electrostatic Chuck Technology.
PRIMAXX - Oxide etchers for MEMS application
XACTIX - Silicon etching for MEMS
WORLDEX -Silicon parts for process chambers
Faith Enterprises - mass transfer systems
Furnace Equipment for Semiconductor and Solar Cell Industry
Heating Elements for Direct Replacement
Highly Advanced  Systems for Carbon Nanotube growth