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Pressure, Flow
Level & Temperature Products for
Ultra Clean Processing
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- Chiller Units for Semiconductor Equipment
- Used with Etch, CVD, CMP, Ion Implant and RTP Equipment
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- OLEDs Manufacturing System
(vacuum
evaporation & encapsulation)
- SUNICEL plus100 (for R&D) /
SUNICEL
plus200 (for Pilot)
- SUNICEL plus400
(for Mass Production:
Tack time 4 min/sheet)
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WORLDEX -Silicon parts for process chambers |
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Furnace Equipment for Semiconductor and
Solar Cell Industry
Heating Elements for Direct Replacement |