innodys

Your partner for Dry Processes !
Sales and Service for the following companies:
Pressure, Flow
Level & Temperature Products for
Ultra Clean Processing
  • Chiller Units for Semiconductor Equipment
  • Used with Etch, CVD, CMP, Ion Implant and RTP Equipment
  • OLEDs Manufacturing System 
    (vacuum evaporation & encapsulation)
  • SUNICEL plus100 (for R&D) /
    SUNICEL plus200 (for Pilot)
  • SUNICEL plus400 
    (for Mass Production: Tack time 4 min/sheet)
WORLDEX -Silicon parts for process chambers
Furnace Equipment for Semiconductor and Solar Cell Industry
Heating Elements for Direct Replacement